MeX turns any SEM into a optical 3D measuring system
MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination.
![](https://assets.inoovum.io/_Resources/Persistent/b94e99b2dc5181b5c0b78913290a3b9ec8afd7bb/3d8f37c1410caab4d1ca6f7665e2fa2b5ff17ed2/MeX-650x650.png)
What is possible with MeX
![Height & roughness measurement Height & roughness measurement](https://assets.inoovum.io/_Resources/Persistent/b94e99b2dc5181b5c0b78913290a3b9ec8afd7bb/77db61331b8873ef9b9e59ba38e183e8bcf1a07e/icon_height__.png)
Height & roughness measurement
Profile measurement enables virtual cutting of specimen. The user defines a path on the optical image and receives the corresponding 3D profile. Roughness and contour measurements conform to recognized international EN ISO standards such as 4287/4288. The profile analysis also allows the fitting of primitives such as circles, angles or others.
![Volume analysis Volume analysis](https://assets.inoovum.io/_Resources/Persistent/b94e99b2dc5181b5c0b78913290a3b9ec8afd7bb/e710f88900f8cf71effec77cd667e30b3a8dc3ee/csm_icon_volume__fa8a6f7de2.png)
Volume analysis
Volume analysis calculates the volume of voids and protrusions. The measurement area is defined directly on the optical image. The volume is determined throughout the computation of a soap film model. For the 3Dboundary of the selected area MeX calculates a covering surface that behaves like a soap film.
![Area measurement Area measurement](https://assets.inoovum.io/_Resources/Persistent/b94e99b2dc5181b5c0b78913290a3b9ec8afd7bb/2de87f2576b0e5e3274e7d5553fc0fca76b0f503/csm_icon_area_97c7a34af3.png)
Area measurements
Area analysis provides the determination of Sa, Sq and Sz over a surface. Parameters like roughness, waviness and the fractal dimension of user defined surface patches are achieved. MeX automatically calculates the ISO conform analysis. For the visual representation of the surface a grey scale or pseudo colored depth map can be used. It is also possible to display ISO-lines to highlight depth variations.