Paper: Vertical Focus Probing and the use in Dimensional Metrology
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This new technology is an extension of the Focus-Variation technology and hence a pure optical measurement technology. It allows the measurement of vertical walls and micro holes directly without articulating the sample during the measurement. Read in this recently published R&D paper more about the measurement principle of Vertical Focus Probing and the impact of this method with respect to micro hole measurement and 3D measurements of steep flanks with a slope angle of more than 90°. For all measurements the optical coordinate measurement machine µCMM is used.