CIRP Paper - Highly accurate optical µCMM for measurement of micro holes
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Highly accurate measurements of small structures are challenging in many applications. An example is the optimization of the hole geometry in fuel injectors. Due to the small size of the structure, tactile approaches are insufficient while standard optical measurement systems cannot provide data on complex geometries. In this paper, a new purely optical 3D micro-coordinate machine – the µCMM of Alicona and its accuracy by determining the maximum permissible translatory and stationary error is presented. Moreover, we demonstrate that the focus variation principle allows 3D measurements of such small components by presenting the measurement and evaluation of micro injection holes.
Zangl, Kerstin & Danzl, Reinhard & Helmli, Franz & Prantl, Manfred. (2018). Highly accurate optical µCMM for measurement of micro holes. Procedia CIRP. 75. 397-402. 10.1016/j.procir.2018.05.098.