Paper: Vertical Focus Probing and the use in Dimensional Metrology

Lateral probing, as it is known from the tactile world, is no longer restricted to tactile measurement instruments. Vertical Focus Probing opens new possibilities in coordinate measurement applications and closes the gap between tactile and optical coordinate measurement instruments.

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This new technology is an extension of the Focus-Variation technology and hence a pure optical measurement technology. It allows the measurement of vertical walls and micro holes directly without articulating the sample during the measurement. Read in this recently published R&D paper more about the measurement principle of Vertical Focus Probingand the impact of this method with respect to micro hole measurement and 3D measurements of steep flanks with a slope angle of more than 90°. For all measurements the optical coordinate measurement machine µCMM is used.

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