Scientific Paper

Optical 3D Metrology

Scientific Paper

Here you can find an overview of current publications of our R&D department, e.g. on the topic of "Focus Variation" or "Vertical Focus Probing".

Highly accurate optical µCMM for measurement of micro holes
Highly accurate optical µCMM for measurement of micro holes More
Vertical Focus Probing and the use in Dimensional Metrology
Vertical Focus Probing and the use in Dimensional Metrology More