The core of MeX is formed by its innovative 3D reconstruction algorithms. The research and development team of Alicona Imaging have invented methods that generate highly accurate, dense and robust results. This unique performance becomes obvious in images of complex structures with steep edges and drop offs in addition to demanding samples with low texture and signal-to-noise-ratio. This high quality is achieved irrespective of image magnification.

Conventional approaches rely on the use of two images. This comes with the major drawback that the overall accuracy of the 3D measurement is partly dependent on the accurate reading of the tilt angle. It is also commonly known that this reading maybe error-prone and can only be achieved to a certain level of accuracy. Latest developments of Alicona have extended this stereoscopic approach to a third image. As a result the user defined parameters, such as the tilt angle, are automatically calculated. This omits the influence of the user and allows, for the first time, traceable 3D measurement in the SEM.

The uniqueness of MeX is in its accuracy and robustness. But in order to perform appropriate measurements, beyond conventional visualization, analysis following international standards must be available. In MeX, the easy to use, roughness and area analysis are provided to EN/ISO standards. Measurements are performed directly on the SEM image. Printing and exporting the actual representations of an image are a one-click operation. The visual link between the surface and the image enable precise and flexible measurements. Even volumetric analysis is conveniently feasible. Therefore MeX is the only software package that turns a SEM into a true 3D metrology device. 

No additional hardware is necessary to run MeX. As a pure software solution MeX can be operated with any SEM requiring only images in common formats. The software is self-installing and works completely independently of any third party drivers or components. The user interface of the overall package is very user friendly and self-explanatory. Data is obtained quickly and effectively. A wizard guides the user through the reconstruction process which then automatically converts the information to a 3D data set. The consecutive analysis is again intuitive and the user is not confronted with unnecessary functionality. The user finds exactly what is expected from a 3D metrology package.