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Technical Specification

General Specification

Measurement principle non-contact, optical, 3 dimensional, based on Focus-Variation
Measurement result 2-100mio 3D points in registered true color information (maximum is dependent on the used measurement module)
Maintenance maintenance free
Illumination White LED coaxial light, high power, controllable
optional: White LED ring light, controllable, polarisation
Nosepiece 6-objective manual or motorized
Travel range: X:100mm, Y:100mm, Z:100mm
Weight 95-100kg, depending on equipment
Size of measurement system WxDxH 710mm x 540mm x 628mm (up to 768mm)
Temperature range possible: 5° - 40°C; calibrated for: 18° - 22°C (other temperature ranges can be calibrated)
Temperature gradient less than 1° per hour
Power supply 900W;110-230V~;50-60Hz
Dimensions ControlUnit (WxDxH) 540mm x 360mm x 682mm

Specimen

Specimen surface texture surface topography Ra above 10-15nm, depending on surface structure
Material any solid surface
Max. height of object 100mm up to 240mm
Max. weight of object 20 kg, more on inquiry
Maximum slope angle up to 90°
Sample preparation none
*) This nano-roughness is necessary to measure the surface. When measuring roughness values (Ra, Rz etc.) Ra values >100nm are measured.

Objective Details

Objectives
  2,5x 5x 10x 20x 50x 100x
Sampling Distance
µm 3.52 1.76 0.88 0.44 0.18 0.09
Optical lateral resolution
µm 5.6 2.2 1.1 0.8 0.6 0.4
Vertical resolution (low speed)*
nm 2300 410 100 50 20 10
Vertical resolution (high speed)*
nm 47100 8200 2000 1000 400 200
Scan speed (low)
µm/s 112 20 5.0 2.5 1.0 0.5
Scan speed (high)**
µm/s 2300 400 100 50 20 10
Vertical dynamic
  3400 52000 160000 250000 430000 380000
Working distance
mm 8.8 23.5 17.3 13 10.1 3.5
Field of view X
µm 5716 2858 1429 715 286 143
Field of view Y
µm 4351 2175 1088 544 218 109
*) Vertical resolution can be adjusted depending on the application, this also influences the scan.
**) The maximum scan speed is not achieved by every application.

Resolution and Application Limits

Objectives
  2,5x 5x 10x 20x 50x 100x
Min. measurable height
nm 2300 410 100 50 20 10
Max. measurable height
mm 8 22 16 12 9 3.2
Max. measurable area
mm² 10000 10000 10000 4500 700 150
Max. measurable profile length
mm 100 100 100 100 100 100
Min. repeatability
nm 800 120 30 15 8 3
Min. measurable roughness (Ra)*
nm 7000 1200 300 150 60 30
Min. measurable roughness (Sa)*
nm 3500 600 150 75 30 15
Min. measurable radius
µm 20 10 8 5 2 1
Min. measurable vertical angle
° 20 20 20 20 20 20
The entries in the table are traceable values.
*) The minimum measurable values are dependent on the structure of the specimen.

Software

Measurement modules and utilities standard: ProfileFormMeasurement (height, angle...), ProfileRoughnessMeasurement (Ra...), SurfaceTextureMeasurement (Sa, fractale dimension...), VolumeMeasurement, 3D-Editor, FormRemoval;
Optional: 3DFormMeasurement, DifferenceMeasurement, ContourMeasurement, EdgeMeasurement;
Automation IF Automation (built-in script editor), .NET remoting interface
Visualization 2D-image and high resolution 3D visualization
Database intuitive, graphical database
Import/Export simple export to STL and VRML, import of CAD-data in STL format, QDAS export, variety of reporting functionalities