Technical Specification
General Specification
| Measurement principle | non-contact, optical, 3 dimensional, based on Focus-Variation |
| Measurement result | 2-100mio 3D points in registered true color information (maximum is dependent on the used measurement module) |
| Maintenance | maintenance free |
| Illumination | White LED coaxial light, high power, controllable optional: White LED ring light, controllable, polarisation |
| Nosepiece | 6-objective manual or motorized |
| Travel range: | X:100mm, Y:100mm, Z:100mm |
| Weight | 95-100kg, depending on equipment |
| Size of measurement system WxDxH | 710mm x 540mm x 628mm (up to 768mm) |
| Temperature range | possible: 5° - 40°C; calibrated for: 18° - 22°C (other temperature ranges can be calibrated) |
| Temperature gradient | less than 1° per hour |
| Power supply | 900W;110-230V~;50-60Hz |
| Dimensions ControlUnit (WxDxH) | 540mm x 360mm x 682mm |
Specimen
| Specimen surface texture | surface topography Ra above 10-15nm, depending on surface structure |
| Material | any solid surface |
| Max. height of object | 100mm up to 240mm |
| Max. weight of object | 20 kg, more on inquiry |
| Maximum slope angle | up to 90° |
| Sample preparation | none |
Objective Details
| Objectives | ||||||
| 2,5x | 5x | 10x | 20x | 50x | 100x | |
| Sampling Distance | ||||||
|---|---|---|---|---|---|---|
| µm | 3.52 | 1.76 | 0.88 | 0.44 | 0.18 | 0.09 |
| Optical lateral resolution | ||||||
| µm | 5.6 | 2.2 | 1.1 | 0.8 | 0.6 | 0.4 |
| Vertical resolution (low speed)* | ||||||
| nm | 2300 | 410 | 100 | 50 | 20 | 10 |
| Vertical resolution (high speed)* | ||||||
| nm | 47100 | 8200 | 2000 | 1000 | 400 | 200 |
| Scan speed (low) | ||||||
| µm/s | 112 | 20 | 5.0 | 2.5 | 1.0 | 0.5 |
| Scan speed (high)** | ||||||
| µm/s | 2300 | 400 | 100 | 50 | 20 | 10 |
| Vertical dynamic | ||||||
| 3400 | 52000 | 160000 | 250000 | 430000 | 380000 | |
| Working distance | ||||||
| mm | 8.8 | 23.5 | 17.3 | 13 | 10.1 | 3.5 |
| Field of view X | ||||||
| µm | 5716 | 2858 | 1429 | 715 | 286 | 143 |
| Field of view Y | ||||||
| µm | 4351 | 2175 | 1088 | 544 | 218 | 109 |
**) The maximum scan speed is not achieved by every application.
Resolution and Application Limits
| Objectives | ||||||
| 2,5x | 5x | 10x | 20x | 50x | 100x | |
| Min. measurable height | ||||||
|---|---|---|---|---|---|---|
| nm | 2300 | 410 | 100 | 50 | 20 | 10 |
| Max. measurable height | ||||||
| mm | 8 | 22 | 16 | 12 | 9 | 3.2 |
| Max. measurable area | ||||||
| mm² | 10000 | 10000 | 10000 | 4500 | 700 | 150 |
| Max. measurable profile length | ||||||
| mm | 100 | 100 | 100 | 100 | 100 | 100 |
| Min. repeatability | ||||||
| nm | 800 | 120 | 30 | 15 | 8 | 3 |
| Min. measurable roughness (Ra)* | ||||||
| nm | 7000 | 1200 | 300 | 150 | 60 | 30 |
| Min. measurable roughness (Sa)* | ||||||
| nm | 3500 | 600 | 150 | 75 | 30 | 15 |
| Min. measurable radius | ||||||
| µm | 20 | 10 | 8 | 5 | 2 | 1 |
| Min. measurable vertical angle | ||||||
| ° | 20 | 20 | 20 | 20 | 20 | 20 |
*) The minimum measurable values are dependent on the structure of the specimen.
Software
| Measurement modules and utilities | standard: ProfileFormMeasurement (height, angle...), ProfileRoughnessMeasurement (Ra...), SurfaceTextureMeasurement (Sa, fractale dimension...), VolumeMeasurement, 3D-Editor, FormRemoval; Optional: 3DFormMeasurement, DifferenceMeasurement, ContourMeasurement, EdgeMeasurement; |
| Automation | IF Automation (built-in script editor), .NET remoting interface |
| Visualization | 2D-image and high resolution 3D visualization |
| Database | intuitive, graphical database |
| Import/Export | simple export to STL and VRML, import of CAD-data in STL format, QDAS export, variety of reporting functionalities |