Measurement of plane parallelism of piezo-stacks
The use of piezoelectric fuel injection systems allows, due to their low mass and short switching times, the exact control of both the injection discharge rate and the injection fuel quantity.
For EPCOS, an automotive supplier and manufacturer of fuel injection systems with a leading competence in piezo technology Alicona have developed a robust and highly accurate measurement bench to measure the plane parallelism of the stack.
Based on two optical white light sensors the system measures the distance between the two faces, measurement results have a resolution below 1µm towards the optical axis.
Length measurement has an accuracy of ~ ±1µm.
Accuracy and automatic self calibration are achieved throughout the process by an integrated calibration tool.